Analysis Of Cluster Tool Performance In Semiconductor Manufacturing

Autor:	P.J. Miller, R.E.A. Schelasin, J.L. Mauer
Rok vydání:	2005
Předmět:	Random access memory Parallel processing (DSP implementation) Computer science Semiconductor device fabrication Parallel manipulator Cluster (physics) Parallel computing Throughput (business) Productivity
Zdroj:	Thirteenth IEEE/CHMT International Electronics Manufacturing Technology Symposium.
DOI:	10.1109/iemt.1992.639876
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::9267ea7523593f7370835234c262cb69 https://doi.org/10.1109/iemt.1992.639876 Zobrazit plný text záznamu