Impact of Pad Material Properties on CMP Performance for Sub-10nm Technologies

Autor:	Ashwin Chockalingam, Jason G. Fung, Rajeev Bajaj, Gana Ganapathi, Fred C. Redeker, Zhibo Yuan, Puneet Jawali, Raghava Kakireddy, Daniel Redfield, Aniruddh Khanna, Boyi Fu, Patibandla Nag B, Chris Orilall, Mario Cornejo, Mayu Yamamura
Rok vydání:	2019
Předmět:	Materials science Nanotechnology Material properties Electronic Optical and Magnetic Materials
Zdroj:	ECS Journal of Solid State Science and Technology. 8:P3063-P3068
ISSN:	2162-8777 2162-8769
DOI:	10.1149/2.0121905jss
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::9264d03f5b5a235ad2d23c9c1c2322ee https://doi.org/10.1149/2.0121905jss Zobrazit plný text záznamu