Next-Generation Variable Capacitors to Reduce Capacitance Variable Time Using SiC MOSFETs and p-i-n Diodes in 13.56-MHz RF Plasma Systems

Autor:	Yongsug Suh, Hyunbae Kim, Beomseok Chae, Juhwa Min, Jinho Kim
Rok vydání:	2022
Předmět:	Materials science business.industry Variable time PIN diode Energy Engineering and Power Technology Plasma Capacitance law.invention Variable (computer science) Capacitor law Optoelectronics Electrical and Electronic Engineering business
Zdroj:	IEEE Journal of Emerging and Selected Topics in Power Electronics. 10:1353-1362
ISSN:	2168-6785 2168-6777
DOI:	10.1109/jestpe.2021.3073121
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::9261273484037a464a08c0692342defb https://doi.org/10.1109/jestpe.2021.3073121 Zobrazit plný text záznamu