Surface smoothing by energetic cluster impact

Autor:	Daniel Rieser, Hellmut Haberland, Michael Moseler, Jürgen Kraft, Oliver Rattunde, Andreas Häfele
Rok vydání:	2001
Předmět:	Mesoscopic physics Materials science business.industry Ion plating General Physics and Astronomy Surface finish Molecular physics Optics Cluster (physics) Surface roughness Thin film business Ion beam-assisted deposition Smoothing
Zdroj:	Journal of Applied Physics. 90:3226-3231
ISSN:	1089-7550 0021-8979
DOI:	10.1063/1.1398067
Popis:	This article reports on experimental observations of surface smoothing by high energy cluster impact. Thin films have been produced by energetic cluster impact deposition (ECI), and the surface roughness and the power spectrum of the films have been measured by atomic force microscopy. By depositing large metal clusters onto an initially rough substrate, the surface roughness is significantly reduced. On the other hand, the roughness of initially smooth surfaces increases only logarithmically. Results for both surface roughness and power spectrum can be quantitatively explained by a recently developed mesoscopic model for the ECI process employing a stochastic differential equation. In this model the smoothing effect results from a downhill particle current (consisting of both cluster and surface atoms) transferring the higher lying parts of the surface profile into the valleys.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::91c4e798ea20470a781ec268b2e79b50 https://doi.org/10.1063/1.1398067 Zobrazit plný text záznamu