A CMOS Compatible MEMS Pirani Vacuum Gauge with Monocrystal Silicon Heaters and Heat Sinks
| Autor: | Le-Min Zhang, Chen Dapeng, Chih-Wei Ku, Binbin Jiao, Yun Shichang, Yanmei Kong |
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| Rok vydání: | 2017 |
| Předmět: |
Microelectromechanical systems
Materials science Silicon business.industry 020208 electrical & electronic engineering General Physics and Astronomy chemistry.chemical_element 02 engineering and technology Heat sink Gauge (firearms) 021001 nanoscience & nanotechnology chemistry 0202 electrical engineering electronic engineering information engineering Optoelectronics 0210 nano-technology business Cmos compatible |
| Zdroj: | Chinese Physics Letters. 34:025101 |
| ISSN: | 1741-3540 0256-307X |
| DOI: | 10.1088/0256-307x/34/2/025101 |
| Databáze: | OpenAIRE |
| Externí odkaz: |
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