Effective method to automatically measure the profile parameters of integrated circuit from SEM/TEM/STEM images
| Autor: | Yaoming Shi, Alien Lin, Fu Zubiao, Zhang Xiaolin, Yi Huang, Yiping Xu |
|---|---|
| Rok vydání: | 2017 |
| Předmět: |
Measure (data warehouse)
Engineering Underdetermined system business.industry Pattern recognition 02 engineering and technology Repeatability Integrated circuit 021001 nanoscience & nanotechnology 01 natural sciences Metrology law.invention 010309 optics Template law 0103 physical sciences Pattern recognition (psychology) Effective method Computer vision Artificial intelligence 0210 nano-technology business |
| Zdroj: | 2017 China Semiconductor Technology International Conference (CSTIC). |
| DOI: | 10.1109/cstic.2017.7919843 |
| Popis: | An effective image based method to automatically measure the profile parameters (PPs), including the critical dimensions (CDs), the full height and other structural parameters, of the integrated circuit (IC) devices in batch is proposed. In this method, templates are used to indicate the patterns of interest and the regions of the desired PPs; pattern recognition and PPs analysis algorithms are applied to determine the exact PPs from the underdetermined IC device images. In practice, the proposed method was proven of higher efficiency, more accuracy and better repeatability than the traditional manual measurement. |
| Databáze: | OpenAIRE |
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