Геометрическая форма областей разрушения в ходе скользящей наноиндентации тонких пленок Si-C-N, применяемых для Н/МЭМС

Autor: A.S. Bhattacharyya, R. Dash
Rok vydání: 2022
Zdroj: Письма в журнал технической физики. 48:3
ISSN: 0320-0116
DOI: 10.21883/pjtf.2022.15.53122.19132
Popis: The failure regions during sliding nano indentation of technologically important SiCN thin films resembled geometrical shapes of Lemniscate and cardiod. An adhesive strength of 9 GPa was estimated. The failure followed two different stress regimes, one tangential responsible for the wear and the other axial responsible for the film/substrate adhesion. EDS spectra of the scratched region shown complete adhesive failure.
Databáze: OpenAIRE