9.5 % Scandium Doped ALN PMUT Compatible with Pre-Processed CMOS Substrates
| Autor: | Eyglis Ledesma, Arantxa Uranga, Ivan Zamora, Nuria Barniol |
|---|---|
| Rok vydání: | 2021 |
| Předmět: |
Piezoelectric coefficient
Materials science business.industry Fluorinert 010401 analytical chemistry chemistry.chemical_element Nitride 01 natural sciences Piezoelectricity 0104 chemical sciences Transducer chemistry 0103 physical sciences PMUT Optoelectronics Ultrasonic sensor Scandium business 010301 acoustics |
| Zdroj: | 2021 IEEE 34th International Conference on Micro Electro Mechanical Systems (MEMS). |
| DOI: | 10.1109/mems51782.2021.9375359 |
| Popis: | This paper presents an 80 µm squared piezoelectric micromachined ultrasonic transducer (PMUT) using 9.5 % scandium-doped aluminum nitride (AlScN). The improvement in the effective piezoelectric coefficient (e 31,f ) and consequently in the membrane displacement was demonstrating according with the FEM simulation. The proposed device has a high piezoelectric coefficient factor (k t 2) in air, 2.76 %, and also in liquid environment, 1.12 %. The output pressure normalized at 1.5 mm in Fluorinert gives 12.57 kPa/V/mm2, ~ 9 times higher than 7x7 AlScN array (1.4 kPa/V/mm2). Pulse-echo experiment was validated with a single PMUT considering as reflected surface the air-liquid interface. |
| Databáze: | OpenAIRE |
| Externí odkaz: |
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