Carbon Capping Layer Effect on Magnetic Properties and Microstructure of FePt/MoC/CrRu Films

Autor:	Y. T. Tseng, S. C. Fu, K. C. Hu, J. L. Tzeng, C. R. Li, Jai-Lin Tsai
Rok vydání:	2015
Předmět:	Materials science Chemical engineering Annealing (metallurgy) Intermediate layer Surface roughness Electrical and Electronic Engineering Sputter deposition Coercivity Carbon layer Epitaxy Microstructure Electronic Optical and Magnetic Materials
Zdroj:	IEEE Transactions on Magnetics. 51:1-4
ISSN:	1941-0069 0018-9464
Popis:	A capping C layer with various thicknesses was sputtered on FePt/MoC/CrRu/glass and postannealed from 190 °C to 365 °C. The optimal magnetic property was obtained at 2 nm-thick C layer annealed at 268 °C and used to discuss an FePt thickness effect. The FePt films with a thickness of 4–10 nm were deposited on MoC/CrRu at 425 °C using magnetron sputtering. The MoC intermediate layer was epitaxially grown on the (200) textured CrRu seed layer, and the FePt film was prepared on the (200) textured MoC at 425 °C. The FePt film shows strong (001) texture, and the out-of-plane coercivity of 7.5 kOe has been demonstrated in 10 nm-thick FePt film. After capping a 2 nm-thick C layer and postannealed at 268 °C, the out-of-plane coercivity was increased to 10 kOe compared with FePt without C capping. From microstructure, the FePt grains were distributed in- or between-islandlike structure and further separated by excess carbon from a capping carbon layer and an MoC intermediate layer.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::90fea115d39523f17a9f58c8754ad067 https://doi.org/10.1109/tmag.2015.2442615 Zobrazit plný text záznamu