Autor:	Arnold Steinman
Rok vydání:	2015
Předmět:	Air Ionization Materials science Electrostatic discharge business.industry Ionization Electrical engineering Optoelectronics Wafer Semiconductor device business
Zdroj:	2015 37th Electrical Overstress/Electrostatic Discharge Symposium (EOS/ESD).
DOI:	10.1109/eosesd.2015.7314759
Popis:	Manufacturing has brought increased semiconductor device functionality through smaller geometries, larger wafer sizes, and faster operating speeds, as well as increased disk drive storage density and display sizes. To produce these advanced technologies the use of air ionization for static control has changed. This paper explores new ionization requirements and methods.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::90bdf7bb23a238cd401dfff0c531024e https://doi.org/10.1109/eosesd.2015.7314759 Zobrazit plný text záznamu