Studying the formation of a true-secondary-electron signal in the low-voltage SEM mode

Autor:	A. A. Podkopaev, V. V. Kazmiruk, I. G. Kurganov, T. N. Savitskaya, N. N. Osipov
Rok vydání:	2017
Předmět:	010302 applied physics Physics AURIGA Scanning electron microscope Mode (statistics) 030206 dentistry Electron 01 natural sciences Signal Secondary electrons Surfaces Coatings and Films 03 medical and health sciences 0302 clinical medicine 0103 physical sciences Thin film Atomic physics Low voltage
Zdroj:	Journal of Surface Investigation: X-ray, Synchrotron and Neutron Techniques. 11:404-407
ISSN:	1819-7094 1027-4510
DOI:	10.1134/s1027451017020288
Popis:	A mathematical model of a SEM (scanning electron microscopy) signal formed by true secondary electrons, i.e., electrons emitted by a sample under the action of primary and inelastically scattered electrons, is proposed. Good agreement between the simulated signals and experimental results obtained on an Auriga (Carl Zeiss) device is attained.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::906d6b2f4c7a3b507c86ed98fb82c60d https://doi.org/10.1134/s1027451017020288 Zobrazit plný text záznamu Full text from SpringerLink