Effect of the cooling rate on the properties of a Si-10% Al alloy for magnetron sputterint targets

Autor:	V. I. Serba, V. G. Korotkov, Yu. V. Kuz’mich, B. M. Freidin, I. G. Kolesnikova, S. I. Voronchuk
Rok vydání:	2006
Předmět:	Quality (physics) Cooling rate Materials science Residual stress Cavity magnetron Metallurgy Alloy Thermal Metals and Alloys engineering Stress distribution engineering.material Residual
Zdroj:	Russian Metallurgy (Metally). 2006:354-357
ISSN:	1555-6255 0036-0295
DOI:	10.1134/s0036029506040136
Popis:	The effect of the cooling rate on the micromechanical properties and residual thermal stresses in Si-10% Al alloy targets has been studied. To reach the required quality, these targets should be cooled at rates of 10–40 K/s. In this case, the alloy has high strength properties, the level of residual stresses in a target is minimal, and the stress distribution is most uniform.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::8fb2f01c0497e56f68fad83ba74be320 https://doi.org/10.1134/s0036029506040136 Zobrazit plný text záznamu Full text from SpringerLink