Transparent semiconducting amorphous cadmium–gallium–tin oxide films by magnetron sputtering with water vapor
| Autor: | Yota Kimura, Chiyuki Sato, Hiroshi Yanagi, Yusuke Koyamaishi |
|---|---|
| Rok vydání: | 2017 |
| Předmět: |
010302 applied physics
Cadmium Materials science Physics and Astronomy (miscellaneous) business.industry Orders of magnitude (temperature) Inorganic chemistry chemistry.chemical_element 02 engineering and technology Sputter deposition 021001 nanoscience & nanotechnology Tin oxide 01 natural sciences Amorphous solid Semiconductor chemistry 0103 physical sciences Optoelectronics Gallium 0210 nano-technology business Water vapor |
| Zdroj: | Applied Physics Letters. 110:252107 |
| ISSN: | 1077-3118 0003-6951 |
| DOI: | 10.1063/1.4989803 |
| Popis: | Amorphous oxide semiconductors (including transparent ones) are attractive materials for next-generation optoelectronic applications. One of the difficulties with amorphous oxide semiconductors is the lack of high mobility (>10 cm2 V−1 s−1) at low carrier density ( |
| Databáze: | OpenAIRE |
| Externí odkaz: |
|