Research Progress of Femtosecond Laser Fabricating Silicon-Based Micro/Nano Structure

Autor:	韩培高 Han Peigao, 闫珂柱 Yan Kezhu, 高胜淼 Gao Shengmiao
Rok vydání:	2013
Předmět:	Materials science law Micro nano Femtosecond Nanotechnology Electrical and Electronic Engineering Laser Atomic and Molecular Physics and Optics law.invention Silicon based
Zdroj:	Laser & Optoelectronics Progress. 50:110002
ISSN:	1006-4125
DOI:	10.3788/lop50.110002
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::8f8cbab2cb3cdb7b6fd3cc686d26515e https://doi.org/10.3788/lop50.110002 Zobrazit plný text záznamu