Surface acoustic wave properties of natural smooth ultra-nanocrystalline diamond characterized by laser-induced SAW pulse technique
| Autor: | Wei-Chuan Fang, I-Nan Lin, Volker Buck, Y.C. Lee, Cheng-Yu Lin, Hagen Schmidt, R. Kunze, Sheng-Chang Lin |
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| Rok vydání: | 2008 |
| Předmět: |
Materials science
Synthetic diamond business.industry Aluminium nitride Mechanical Engineering Diamond General Chemistry Chemical vapor deposition Sputter deposition engineering.material Electronic Optical and Magnetic Materials law.invention chemistry.chemical_compound Optics Carbon film chemistry law Plasma-enhanced chemical vapor deposition Materials Chemistry engineering Optoelectronics Electrical and Electronic Engineering Thin film business |
| Zdroj: | Diamond and Related Materials. 17:446-450 |
| ISSN: | 0925-9635 |
| DOI: | 10.1016/j.diamond.2007.08.025 |
| Popis: | Diamond is one of the best SAW substrate candidates due to its highest sound velocity and thermal conductivity. But conventional diamond films usually express facet structure with large roughness. Ultra-nanocrystallined diamond (UNCD) films grown in a 2.45 GHz IPLAS microwave plasma enhanced chemical vapor deposition (MPECVD) system on Si (100) substrates in CH4-Ar plasma possess naturally smooth surface and are advantageous for device applications. Moreover, highly C-axis textured aluminum nitride (AlN) films can be grown by DC-sputtering directly on UNCD coated Si substrate. However, properties of UNCD films are much complex than microcrystalline diamond films, that is because this is a very complex material system with large but not fixed portion of grain boundaries and sp2/sp3 bonding. Properties of UNCD films could change dramatically with similar deposition condition and with similar morphologies. A simple and quick method to characterize the properties of these UNCD films is important and valuable. Laser-induced SAW pulse method, which is a fast and accurate SAW properties measuring system, for the investigation of mechanical and structure properties of thin films without any patterning or piezoelectric layer. |
| Databáze: | OpenAIRE |
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