Iron Diffusion Profile Studies by Surface Photo-voltage for Silicon Iron Implanted Wafers after Rapid Thermal Anneal
| Autor: | Igor Rapoport, Patrick Taylor, Seung-Bae Kim, Benno Orschel |
|---|---|
| Rok vydání: | 2006 |
| Zdroj: | ECS Meeting Abstracts. :347-347 |
| ISSN: | 2151-2043 |
| Popis: | not Available. |
| Databáze: | OpenAIRE |
| Externí odkaz: |
|