Photo-dynamic Study of Tin based Hybrid n-CAR Resist for Next Generation EUVL

Autor:	S W Cendron, G K Belmonte, G P Reddy, M G Moinuddin, J Peter, C A S Moura, G Lando, S K Sharma, K E Gonsalves, D E Weibel
Jazyk:	angličtina
Rok vydání:	2019
DOI:	10.13140/rg.2.2.18417.02409
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::8f3fbf38f42cec5453fbad92da836cd8