Laser Fabrication Of Photomasks For Hybrid Circuits

Autor:	Robert T. Crowley
Rok vydání:	1986
Předmět:	Fabrication Materials science business.industry Substrate (printing) Photoresist Laser Semiconductor laser theory law.invention Surface micromachining Optics law Optoelectronics Photomask Resistor business
Zdroj:	SPIE Proceedings.
ISSN:	0277-786X
DOI:	10.1117/12.956408
Popis:	This paper describes a technique for generating photomasks for hybrid circuits using a laser resistor trimming system. Photomasks can be generated by two separate techniques: micromachining a thin opaque film on a transparent substrate with a Nd:YAG laser, or exposing a photoresist covered blank photomask with an argon ion laser.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::8f3d5238e318686f9211b46f95f18cf0 https://doi.org/10.1117/12.956408 Zobrazit plný text záznamu