Gigahertz monolithic delay lines for surface acoustic waves on Silicon

Autor:	W. Seidel, Udo Christian Kaletta, B. Drescher, Dirk Wolansky, K Biermann, S Rauwerdink, Ch. Wenger, Mirko Fraschke, M Kaynak, Paulo V. Santos
Rok vydání:	2012
Předmět:	Materials science Silicon business.industry Silicon dioxide Electrical engineering chemistry.chemical_element Resonance Acoustic wave Piezoelectricity Wavelength chemistry.chemical_compound Transducer chemistry Optoelectronics business Layer (electronics)
Zdroj:	IOP Conference Series: Materials Science and Engineering. 41:012009
ISSN:	1757-899X 1757-8981
DOI:	10.1088/1757-899x/41/1/012009
Popis:	We demonstrate the electrical generation of GHz surface acoustic waves (SAWs) on silicon chips using a process entirely compatible with standard CMOS fabrication. In this process, the interdigitated acoustic transducers are embedded in a silicon dioxide layer, which is subsequently coated with a piezoelectric ZnO film. We show that delay lines with sub-μm wavelength fabricated using this process reach resonance frequencies approaching 4 GHz.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::8f2e0a3b9c2838fa6ccc38184a283940 https://doi.org/10.1088/1757-899x/41/1/012009 Zobrazit plný text záznamu