CoPt Antidot Arrays Fabricated With Dry-Etching Using AAO Templates
| Autor: | Hao Zeng, Chenhua Deng, Xin-Yu Qiao, Yaning Yan, Fang Wang, Xiaohong Xu, Jiu-Ping Fan |
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| Rok vydání: | 2016 |
| Předmět: | |
| Zdroj: | IEEE Transactions on Magnetics. 52:1-5 |
| ISSN: | 1941-0069 0018-9464 |
| Popis: | Recently, magnetic antidot arrays have been studied extensively [1, 2] due to their potential applications in magnetic recording media, sensors and flux pinning in superconductors. Magnetic antidot arrays with perpendicular anisotropy, which consist of densely packed nonmagnetic nano-columns within exchange coupled magnetic grains, can be regarded as the percolated perpendicular media [3]. The nonmagnetic nano-columns can serve as pinning sites which can influence the magnetic properties of films. It is a great challenge to obtain tunable antidot arrays with controlled orientation, high areal density and large area. L1 0 -CoPt and FePt alloys are ideal candidates for ultrahigh density data storage media due to their high anisotropy constant [4]. In this work, we fabricated CoPt/Ag antidot arrays with small size and high areal density, using ultrathin anodic aluminum oxide (AAO) template as a dry etching mask. Ag as an underlayer can reduce the ordering temperature and enhance the (001) texture [5]. Compared to other methods such as direct deposition of a CoPt thin film on AAO templates, this method has the advantage of easily controllable (001) orientation, while the orientation of CoPt films directly deposited on the amorphous AAO template would be random. Direct deposition also cannot obtain a clean antidot array since the deposited material inevitably lands on side walls and/or on the substrate. |
| Databáze: | OpenAIRE |
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