| Autor: |
P.U. Kenkare, Ravi Subrahmanyan, Rama I. Hegde, Vidya Kaushik, James D. Hayden, James R. Pfiester |
| Rok vydání: |
2002 |
| Předmět: |
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| Zdroj: |
Proceedings of IEEE International Electron Devices Meeting. |
| Popis: |
The bird's beak profile for LOCOS-based isolations is shown to be a strong function of the patterned nitride width. In particular, the bird's beak height is found to be much smaller for intermediate widths (/spl sim/0.6 /spl mu/m) than for either very wide or very narrow nitride lines. These width-dependent phenomena are explained using simulation. Furthermore, the use of Atomic Force Microscopy (AFM) is presented as a convenient approach for quantifying the 2-D encroachment effects common to all LOCOS-based schemes. > |
| Databáze: |
OpenAIRE |
| Externí odkaz: |
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