Measurement of thickness and roughness using gwyddion

Autor: Uttara Kumari M, Satheesh Babu G, Yadhuraj S.R
Rok vydání: 2016
Předmět:
Zdroj: 2016 3rd International Conference on Advanced Computing and Communication Systems (ICACCS).
DOI: 10.1109/icaccs.2016.7586314
Popis: The measurement of thickness and roughness parameters are prime importance in thin film technologies and SPM (Scanning Probe Microscopy) based measurements. Unfortunately data processing is neglected compared to the importance given to the scanning of the data. Many inbuilt softwares are made available to the user which are complex and need expertise user. In this regards gwyddion provides the user friendly and open sources software available for data processing and statistical analysis of the sampled data obtained from SPM measurements. In this work the SPM data are obtained through the database and its morphologies and meteorology are studied using gwyddion software. The results obtained shows software could able to detect with the resolution of nanometers and the software can be used to measure the thickness and roughness measurements with reliable accuracy.
Databáze: OpenAIRE