Integrity of Micro-Hotplates During High-Temperature Operation Monitored by Digital Holographic Microscopy
| Autor: | Robert Meyer, S. Hamann, Klaus Hackl, Martin R. Hofmann, Nektarios Koukourakis, Alfred Ludwig, E Darakis, Yiu Wai Lai, M Ehmann, Nils C. Gerhardt |
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| Rok vydání: | 2010 |
| Předmět: |
Materials science
business.industry Heating element Mechanical Engineering Resolution (electron density) Holography Deformation (meteorology) Temperature measurement law.invention Optics law Optoelectronics Digital holographic microscopy Electrical and Electronic Engineering business Digital holography Surface states |
| Zdroj: | Journal of Microelectromechanical Systems. 19:1175-1179 |
| ISSN: | 1941-0158 1057-7157 |
| Popis: | An investigation on the integrity of micro-hotplates using in situ digital holographic microscopy is reported. The surface topography and surface evolution of the devices during high-temperature operation (heating/cooling cycles) is measured with nanometer-scale resolution. A localized permanent out-of-plane surface deformation of 40% of the membrane thickness caused by the top measurement electrodes occurring after the first cycle is observed. The integrity-related issues caused by such a permanent deformation are discussed. |
| Databáze: | OpenAIRE |
| Externí odkaz: |
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