Development of a 300kV ultrahigh resolution analytical electron microscope

Autor:	Kurio Fukushima, Yoshihiro Arai, Masahiro Kawasaki, Yasushi Kokubo
Rok vydání:	1991
Předmět:	Materials science Ultrahigh resolution business.industry Analytical electron microscope Optoelectronics General Medicine business
Zdroj:	Proceedings, annual meeting, Electron Microscopy Society of America. 49:350-351
ISSN:	2690-1315 0424-8201
DOI:	10.1017/s0424820100086052
Popis:	Intended for atomic-level observation and analysis in the material science field, a 300 kV ultrahigh resolution analytical electron microscope (UHRAEM) has been newly developed on the basis of the JEM-2010, a 200 kV UHRAEM. There are two versions: the UHR version, intended for ultrahigh resolution observation with a point resolution of 0.17 nm and the multi-purpose HT version, featuring specimen tilt angles as large as± 40° , and heating and cooling holders. The external view of the instrument is shown in Fig.1. Some characteristic features of the 300 kV UHRAEM are shown as follows.Electron Gun: An extremely stable and compact 300 kV election gun is constructed with 10-stage accelerating tube. SF6 gas is used for electric insulation.
Databáze:	OpenAIRE
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