Analysis of hydrogen diffusion from proton‐exchanged layers in LiNbO3

Autor: Steven W. Novak, H. C. Casey, J. M. Zavada, Chang‐Ho Chen
Rok vydání: 1993
Předmět:
Zdroj: Applied Physics Letters. 63:718-720
ISSN: 1077-3118
0003-6951
DOI: 10.1063/1.109938
Popis: Hydrogen profiles for proton‐exchanged layers in Z‐cut LiNbO3 were obtained by secondary ion mass spectrometry measurements after annealing at 400 °C for times from 6 to 180 min. To fit the measured hydrogen profiles, it was necessary to use two separate Gaussian diffusion profiles which could be designated as a more slowly diffusing substitutional hydrogen on lithium sites and a more rapidly diffusing interstitial hydrogen. At 400 °C, analysis leads to a substitutional hydrogen diffusion coefficient Ds≊4.6×10−12 cm2/s and an interstitial hydrogen diffusion coefficient Di≊1.5×10−11 cm2/s.
Databáze: OpenAIRE