Analysis of hydrogen diffusion from proton‐exchanged layers in LiNbO3
Autor: | Steven W. Novak, H. C. Casey, J. M. Zavada, Chang‐Ho Chen |
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Rok vydání: | 1993 |
Předmět: |
chemistry.chemical_classification
Physics and Astronomy (miscellaneous) Ion exchange Hydrogen Annealing (metallurgy) Lithium niobate Lattice diffusion coefficient Analytical chemistry chemistry.chemical_element Secondary ion mass spectrometry chemistry.chemical_compound Impurity diffusion chemistry Physics::Atomic Physics Inorganic compound |
Zdroj: | Applied Physics Letters. 63:718-720 |
ISSN: | 1077-3118 0003-6951 |
DOI: | 10.1063/1.109938 |
Popis: | Hydrogen profiles for proton‐exchanged layers in Z‐cut LiNbO3 were obtained by secondary ion mass spectrometry measurements after annealing at 400 °C for times from 6 to 180 min. To fit the measured hydrogen profiles, it was necessary to use two separate Gaussian diffusion profiles which could be designated as a more slowly diffusing substitutional hydrogen on lithium sites and a more rapidly diffusing interstitial hydrogen. At 400 °C, analysis leads to a substitutional hydrogen diffusion coefficient Ds≊4.6×10−12 cm2/s and an interstitial hydrogen diffusion coefficient Di≊1.5×10−11 cm2/s. |
Databáze: | OpenAIRE |
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