Electrical Features of Radio-frequency, Atmospheric-pressure, Bare-metallic-electrode Glow Discharges
| Autor: | Guo Li, Wenting Sun, He-Ping Li, Cheng-Yu Bao, Hua-Bo Wang |
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| Rok vydání: | 2007 |
| Předmět: |
Glow discharge
Neon lamp Argon General Chemical Engineering Brush discharge chemistry.chemical_element General Chemistry Dielectric barrier discharge Condensed Matter Physics Surfaces Coatings and Films law.invention Electric discharge in gases chemistry law Partial discharge Breakdown voltage Atomic physics |
| Zdroj: | Plasma Chemistry and Plasma Processing. 27:529-545 |
| ISSN: | 1572-8986 0272-4324 |
| DOI: | 10.1007/s11090-007-9079-x |
| Popis: | Radio-frequency (RF), atmospheric-pressure glow discharge (APGD) plasmas with bare metallic electrodes have promising prospects in the fields of plasma-aided etching, deposition, disinfection and sterilization, etc. In this paper, an induced gas discharge approach is proposed for obtaining the RF, atmospheric-pressure, γ-mode, glow discharges with pure nitrogen or air as the primary plasma-working gas using bare metallic electrodes. The discharge characteristics, including the discharge mode, the breakdown voltage and discharge voltage for sustaining α mode and/or γ mode discharges, of the RF APGD plasmas of helium, argon, nitrogen, air or their mixtures using a planar-type plasma generator are presented in this study. The uniformity (no filaments) of the discharges is confirmed by the images taken by an iCCD with a short exposure time (10 ns). The effects of different gap spacings and electrode materials on the discharge characteristics, the variations of the sheath thickness and the electron number density are also studied in this paper. |
| Databáze: | OpenAIRE |
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