Deactivation of Phosphorus by Carbon in Recrystallized Silicon

Autor:	Jui-Chang Lin, Ruey-Dar Chang, Hsueh-Chun Liao
Rok vydání:	2019
Předmět:	Materials science Silicon chemistry Chemical engineering Phosphorus chemistry.chemical_element Carbon Electronic Optical and Magnetic Materials
Zdroj:	ECS Journal of Solid State Science and Technology. 8:P262-P266
ISSN:	2162-8777 2162-8769
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::8e9b225caf42117d2b59db72faf22b81 https://doi.org/10.1149/2.0041904jss Zobrazit plný text záznamu