CZT smart dicing strategy for cost reduction using defect imaging and random-access machining

Autor: Wenwu Zhang, Gil Abramovich, Kristian W. Andreini, Tan Zhang, J. Eric Tkaczyk, Christopher Allen Nafis, Kevin George Harding, Yana Z. Williams
Rok vydání: 2010
Předmět:
Zdroj: SPIE Proceedings.
ISSN: 0277-786X
DOI: 10.1117/12.865861
Popis: Current spectroscopic detector crystals contain defects that prevent economic production of devices with sufficient energy resolution and stopping power for radioisotope discrimination. This is especially acute for large monolithic crystals due to increased defect opportunity. The proposed approach to cost reduction starts by combining stereoscopic IR and ultrasound (UT) inspection coupled with segmentation and 3D mapping algorithms. A "smart dicing" system uses "random-access" laser-based machining to obtain tiles free of major defects. Application specific grading matches defect type to anticipated performance. Small pieces combined in a modular sensor pack instead of a monolith will make the most efficient use of wafer area.
Databáze: OpenAIRE