Effects of Remote Boundary Conditions on Clamping Loss in Micromechanical Resonators

Autor:	James M. L. Miller, Gabrielle D. Vukasin, Ze Zhang, Hyun-Keun Kwon, Arun Majumdar, Thomas W. Kenny, Steven W. Shaw
Rok vydání:	2022
Předmět:	Mechanical Engineering Electrical and Electronic Engineering
Zdroj:	Journal of Microelectromechanical Systems. 31:204-216
ISSN:	1941-0158 1057-7157
DOI:	10.1109/jmems.2021.3136885
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::8e69e7668058fa2b53f70e436d1e0bea https://doi.org/10.1109/jmems.2021.3136885 Zobrazit plný text záznamu