UV Assisted Densification of Perhydropolysilazane (PHPS) Based Spin-On Glass in High Aspect Ratio Gap Fill Structure
| Autor: | Stephan Grunow, Balasubramanian S. Haran, Zeynel Bayindir, Joseph F. Shepard, Jinping Liu, Brett Yatzor, Han Tao, Sanjay Mehta, Marc Berardi, Haifeng Sheng, Rishikesh Krishnan |
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| Rok vydání: | 2018 |
| Předmět: | |
| Zdroj: | ECS Transactions. 85:717-728 |
| ISSN: | 1938-5862 1938-6737 |
| Databáze: | OpenAIRE |
| Externí odkaz: |
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