Radiation degradation of copolymers of methyl methacrylate and 3-oximino-2-butanone methacrylate

Autor:	Elsa Reichmanis, T. N. Bowmer, M. Y. Hellman, C. W. Wilkins
Rok vydání:	1982
Předmět:	chemistry.chemical_classification chemistry.chemical_compound Chemistry Kinetics Polymer chemistry Copolymer Polymer Methyl methacrylate Radiation chemistry Photochemistry Methacrylate Chemical reaction Bond cleavage
Zdroj:	Journal of Polymer Science: Polymer Chemistry Edition. 20:2661-2668
ISSN:	1542-9369 0360-6376
DOI:	10.1002/pol.1982.170200924
Popis:	Copolymers of methyl methacrylate and 3-oximino-2-butanone methacrylate (OM) were investigated as deep-UV and e-beam resists. Their increased sensitivity relative to PMMA (up to 50 times) was correlated with the radiation chemical yields of the volatile products and main chain scissions. The degradation of these copolymers, activated by the 3-oximino-2-butanone entity, is discussed in terms of energy absorption mechanisms and the subsequent scission reactions.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::8dcdf25b7b04dd14ddfa117700ef9cf9 https://doi.org/10.1002/pol.1982.170200924 Zobrazit plný text záznamu Plný text