Measurement of the absolute accuracy (to <0.5%) of a clip-level beam profiler using Fresnel diffraction by a wide slit

Autor:	John M. Fleischer, Thomas F. Johnston
Rok vydání:	1995
Předmět:	Wavefront Diffraction Physics Beam diameter Optics Beam (nautical) Aperture business.industry Optical engineering Near-field optics business Fresnel diffraction
Zdroj:	SPIE Proceedings.
ISSN:	0277-786X
DOI:	10.1117/12.206987
Popis:	By comparing the measured width of an optical test patten to the known width, the absolute error of a clip-level profiler is determined to be (-0.1 +/- 0.3)%. An expanded fundamental mode beam illuminates a pair of opposed knife edges (a wide slit) to generate the test pattern by Fresnel diffraction. Analysis of the diffraction pattern gives 18.2% as the appropriate clip level to read the geometrical shadow width between edges (with additional small adjustments for illumination non-uniformity and the finite size of the scanning aperture). The separation between the edges is determined by mechanical translation edge to edge through a focused beam. 3© (1995) COPYRIGHT SPIE--The International Society for Optical Engineering. Downloading of the abstract is permitted for personal use only.
Databáze:	OpenAIRE
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