Acoustic and electromechanical properties of 1–3 PZT composites for ultrasonic transducer arrays fabricated by sacrificial micro PMMA mold

Autor: Jin-Woo Cho, Joon-Shik Park, Jin-Ho Han, Soon-Sup Park, Suk-Won Jung, Sun-Ho Lee, Sung-Goon Kang
Rok vydání: 2003
Předmět:
Zdroj: Sensors and Actuators A: Physical. 108:206-211
ISSN: 0924-4247
DOI: 10.1016/s0924-4247(03)00362-5
Popis: Manufacturing method for 1–3 PZT composites for medical ultrasonic transducer array (UTA) using sacrificial polymethyl-methacrylate (PMMA) micro molds was investigated. The purpose of study was to compare this proposed method (briefly, micro-pressing) with conventional dicing method for UTA fabrication. The cell size was 135 μm × 135 μm with the 35 μm gap between cells, and the cell height was 170 μm. Microstructure of 1–3 PZT composites was dense and had uniform morphology. Dielectric constants at 1 kHz were 2627 for the dicing method and 2221 for the micro-pressing method. Two methods produced similar values for the thickness mode electromechanical coupling coefficients ( K t ): 73% for the dicing method and 68% for the micro-pressing method. Acoustic properties of fabricated ultrasonic transducer by the dicing method were similar to those of the micro-pressing method. Microstructure, electromechanical properties and acoustic properties of 1–3 PZT composites fabricated by the micro-pressing method were comparable to the properties obtained with the conventional dicing method. The micro-pressing method is a cost-effective way of manufacturing micro-ceramic rod arrays with high aspect ratio based on the batch type LIGA process.
Databáze: OpenAIRE
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