Design and fabrication of SiO/sub 2//Si/sub 3/N/sub 4/ integrated-optics waveguides on silicon substrates
| Autor: | Douglas Bulla, Murilo A. Romero, Ben-Hur V. Borges, Nilton Itiro Morimoto, L.G. Neto |
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| Rok vydání: | 2002 |
| Předmět: |
Radiation
Fabrication Silicon photonics Materials science Silicon Scattering business.industry chemistry.chemical_element Chemical vapor deposition Surface finish Condensed Matter Physics Waveguide (optics) Optics chemistry Optoelectronics Electrical and Electronic Engineering business Leakage (electronics) |
| Zdroj: | IEEE Transactions on Microwave Theory and Techniques. 50:9-12 |
| ISSN: | 0018-9480 |
| DOI: | 10.1109/22.981236 |
| Popis: | In this paper, the design and fabrication of silicon-based optical waveguides are revisited. The goal is to develop a novel design and deposition process to minimize leakage losses. Interface roughness and Si/sub 3/N/sub 4/ stoichiometry are examined. The optical loss is measured and contributions from scattering and absorption are determined. |
| Databáze: | OpenAIRE |
| Externí odkaz: |
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