An ALSCN PMUT-on-CMOS Sensor for Monitoring Fluids’ Density, Viscosity, Sound Velocity, and Compressibility
| Autor: | Eyglis Ledesma, Iván Zamora, Jesús Yanez, Arantxa Uranga, Núria Barniol |
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| Rok vydání: | 2023 |
| Zdroj: | 2023 IEEE 36th International Conference on Micro Electro Mechanical Systems (MEMS). |
| DOI: | 10.1109/mems49605.2023.10052334 |
| Databáze: | OpenAIRE |
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