Influence of low-energy proton irradiation on the effective lifetime in the space charge region of silicon n+-p junctions

Autor: M S Kovalenko, M A Voloshin, L R Grigoryan, V S Volodin, N M Bogatov
Rok vydání: 2021
Předmět:
Zdroj: Journal of Physics: Conference Series. 2094:022006
ISSN: 1742-6596
1742-6588
Popis: The effect of low-energy proton irradiation on the pulse characteristics of siliconn+-p-p+structures is analyzed. It is shown that irradiation with protons with an energy of 180 keV and a dose of 1015cm−2creates a region with an effective lifetime of 5.5·10−8s in the space charge region of then+-pjunction. Such elements can be used to create high-speed photodiodes with an operating modulation frequency of 18 MHz.
Databáze: OpenAIRE