Diagnosis and therapy for a recalcitrant parylene coater

Autor:	Jerome T. Rowen, Joel M. Williams
Rok vydání:	1987
Předmět:	Materials science Vacuum pressure Plasma confinement Surfaces and Interfaces Surface finish Condensed Matter Physics Surfaces Coatings and Films Microsphere Surface coating chemistry.chemical_compound Parylene chemistry Thin film Composite material Vacuum coating
Zdroj:	Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films. 5:2760-2762
ISSN:	1520-8559 0734-2101
DOI:	10.1116/1.574736
Popis:	An in‐house built parylene coater produced coatings whose thicknesses varied 50% at the 1‐μm level, whose surfaces were rough and flapjacklike, and whose cross sections looked like foam. This paper details the product response to various equipment and operational changes. The systematic analysis showed that a balance of vacuum pressure and pyrolysis temperature is needed to produce good‐quality coatings.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::8d7a55d58047deb30e1b900e6725588e https://doi.org/10.1116/1.574736 Zobrazit plný text záznamu