Research on ultra-smooth and high efficiency polishing technology of the third generation semiconductor single crystal SiC

Autor:	Lingbo Xie, Ye Tian, Wenxing Wu, Gang Zhou, Shuangpeng Guo
Rok vydání:	2023
Zdroj:	Advanced Optical Manufacturing Technologies and Applications 2022; and 2nd International Forum of Young Scientists on Advanced Optical Manufacturing (AOMTA and YSAOM 2022).
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::8d700ed8ef035542c9d80ac1abbe9ba3 https://doi.org/10.1117/12.2656295 Zobrazit plný text záznamu