| Autor: |
Phyo Thu, M. Larionnov Nikolai, S. Ryabyshenkov Andrei |
| Rok vydání: |
2018 |
| Předmět: |
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| Zdroj: |
2018 IEEE Conference of Russian Young Researchers in Electrical and Electronic Engineering (EIConRus). |
| Popis: |
The air conditioning and filtration systems of clean rooms of microelectronics are designed to maintain a specified class of purity in them. The purpose of this work is to analyze the efficiency of air purification in the main elements of the system. The analysis of efficiency of the multistage air filtration systems was carried out, the distribution of dust concentration in the main elements of the air conditioning and air filtration systems was determined and the concentration of dust particles with a size > 0.5 μm in air was determined depending on the air exchange rate over time in the equipped state. |
| Databáze: |
OpenAIRE |
| Externí odkaz: |
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