4.6µm Low Power Indirect Time-of-Flight Pixel Achieving 88.5% Demodulation Contrast at 200MHz for 0.54MPix Depth Camera

Autor: Christopher Townsend, G. Mugny, Matteo Vignetti, Arnaud Tournier, Jeremie Teyssier, Jean-Raphael Bezal, Raoul Vergara, Pascal Fonteneau, Kevin Channon, Arnaud Authie, Thomas Bouchet, Joao Miguel Melo Santos, Francois Agut, Frederic Lalanne, Bruce Rae, Damien Miclo, Yann Desprez, Pascal Mellot, Laurent Simony, Sara Pellegrini, David Hadden, Stephane Drouard, Franck Hingant, Vincent Farys, Francois Roy, Gregory Bochet, Blandine Roig, Thibault Augey, Cedric Tubert, Celine Mas, Aurelien Mazard, Boris Rodrigues Goncalves
Rok vydání: 2021
Předmět:
Zdroj: ESSCIRC
Popis: This paper describes a 4.3e- RMS low noise 4.6µm Time-of-Flight pixel based on charge domain with kTC noise removal designed to enhance depth camera image quality. The pixel takes advantage of 6µm gradually doped epitaxial layer for 88.5% demodulation contrast at 200MHz and 18.5% QE at 940nm. Buried channel transfer gates are used to enable low capacitive switching and allowing best-in-class 1.4µW/pixel power consumption at 200MHz. The pixel is fully isolated due to deep trench isolation and the pixel bulk is biased at several hundreds of mV for low power Time-of-Flight sensor and system operation. The paper describes the design of 0.54Mpix camera (672 x 804 pixels) implementing demodulation circuits robust against EMI and multi-devices interferences. The performance of an indirect Time-of-Flight system is demonstrated with 1.0% depth noise under 40kLux at 30fps.
Databáze: OpenAIRE