A Review of the Characterization Techniques for the Analysis of Etch Processed Surfaces of HgCdTe and Related Compounds

Autor: K. Brogden, C. M. Lennon, P. J. Smith, N. Supola, R. N. Jacobs, Patrick Maloney, Andrew J. Stoltz, M. Jaime-Vasquez, Alexander Brown, J. D. Benson, L. A. Almeida, J. K. Markunas
Rok vydání: 2014
Předmět:
Zdroj: Journal of Electronic Materials. 43:3708-3717
ISSN: 1543-186X
0361-5235
DOI: 10.1007/s11664-014-3281-4
Popis: HgCdTe is the material system of choice for many infrared sensing applications. Growth of this material can often be challenging. However, processing of this material system can be equally as challenging. Incorrect processing can cause shunting, surface inversion, or high surface recombination velocities that can be detrimental. In order to produce an effective device in HgCdTe, one needs to understand what happens to the HgCdTe surface. Factors like the chemical termination of the HgCdTe surface, surface roughness, and surface reconstruction after a process is performed can dramatically affect the performance of devices made with HgCdTe. We will review different surface characterization techniques and how these techniques can be used conventionally and unconventionally, and how different processes can affect the surfaces of HgCdTe and related compounds.
Databáze: OpenAIRE