Influence of Crystalline Si Solar Cell by Rie Surface Texturing

Autor: In-Gyu Park, Hyoung-Dong Kang, Gi-Chung Kwon, Beop-Jong Jin, Myoung-Soo Yun, Deoc-Hwan Hyun, Joung-Sik Kim, Jong-Yong Choi
Rok vydání: 2010
Předmět:
Zdroj: Journal of the Korean Vacuum Society. 19:314-318
ISSN: 1225-8822
Popis: We fabricated a plasma texturing for multi-crystalline silicon cells using reactive ion etching (RIE). Multi-crystalline Si cells have not benefited from the cost-effective wet-chemical texturing processes that reduce front surface reflectance on single-crystal wafers. Elimination of plasma damage has been achieved while keeping front reflectance to extremely low levels. We will discuss reflectance, quantum efficiency and conversion efficiency for multi-crystalline Si solar cell by each RIE process conditions.
Databáze: OpenAIRE