Observation of Film Growth Phenomena Using Micromachined Structures

Autor:	N. H. Tea, S. Sernancik, Frank Dimeo, J. S. Suchle, J T. Kelliher, Richard E. Cavicchi
Rok vydání:	1996
Předmět:	Materials science Temperature control Materials processing Deposition (phase transition) Nanotechnology Chemical vapor deposition Thin film
Zdroj:	MRS Proceedings. 441
ISSN:	1946-4274 0272-9172
DOI:	10.1557/proc-441-69
Popis:	A method of studying thin film growth and materials processing using micromachined Si-based structures is presented. The microsubstrate platforms (called “microhotplates”) allow temperature control during deposition, andin situmonitoring of the electrical properties of connected coatings. The efficiency of the approach is amplified when multiple. Independentlyoperated elements are used in array configurations. Illustrations here involve chemical vapor deposition of semiconducting oxides, but the methodology can be employed to investigate the growth of other classes of materials as well.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::8cba25eba8e896bd5f8885c0ef429a28 https://doi.org/10.1557/proc-441-69 Zobrazit plný text záznamu Full text from SpringerLink