Optical Submicrometer Displacement Sensor Based on the Herriot Cell
| Autor: | Victor Argueta-Diaz, Juan Jose Campos-Puebla, Celia Sánchez-Pérez |
|---|---|
| Rok vydání: | 2017 |
| Předmět: |
Physics
Optical fiber business.industry 02 engineering and technology Curvature 01 natural sciences Deformable mirror Displacement (vector) law.invention 010309 optics 020210 optoelectronics & photonics Reflection (mathematics) Optics law Position (vector) 0103 physical sciences 0202 electrical engineering electronic engineering information engineering Sensitivity (control systems) Electrical and Electronic Engineering business Instrumentation Beam (structure) |
| Zdroj: | IEEE Sensors Journal. 17:1715-1720 |
| ISSN: | 2379-9153 1530-437X |
| DOI: | 10.1109/jsen.2017.2654802 |
| Popis: | In this paper, we present a displacement sensor using a Herriott cell designed with the cylindrical deformable mirrors. A movable object modifies one of the mirror’s curvature and position in the cell, thus changing the angular path of the output beam that is measured with the knife edge technique. The design results in a compact device with easy manufacturing process for the mirrors. We achieve a sensitivity of $- 1.7~\mu \text{W}/\mu \text{m}$ over the range of $100~\mu \text{m}$ with a precision of $3.0~\mu \text{m}$ . The use of a Herriott cell to measure displacements allows the modification of the sensitivity and range of the sensor according to the number of incidences. |
| Databáze: | OpenAIRE |
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