Low frequency noise degradation in ultra-thin oxide (15A/spl deg) analog n-MOSFETs resulting from valence-band tunneling

Autor: C.C. Cheng, Tahui Wang, C.F. Hsu, Chuan-Li Chang, J.W. You, H.C. Ma, J.W. Wu, G.W. Huang
Rok vydání: 2005
Předmět:
Zdroj: 2005 IEEE International Reliability Physics Symposium, 2005. Proceedings. 43rd Annual..
DOI: 10.1109/relphy.2005.1493095
Popis: The abnormal increase of low frequency flicker noise in analog n-MOSFETs with gate oxide, in the valence band tunneling domain, is investigated. In 15/spl Aring/ oxide devices, valence-band electron tunneling from Si substrate to poly-gate occurs at a positive gate voltage and results in the splitting of electron and hole quasi Fermi-levels in the channel. The excess low frequency noise is attributed to electron and hole recombination at interface traps between the two quasi Fermi-levels. The trap capture and emission times in the valence band tunneling domain are extracted from random telegraph signals. The dependence of measured trap times on gate voltage is consistent with our proposed model.
Databáze: OpenAIRE