Comparison of the precision of a null-ellipsometer to an ellipsometer with a rotating analyzer

Autor:	O. M. Getsko, Eugene G. Bortchagovsky
Rok vydání:	1997
Předmět:	Spectrum analyzer Engineering Formalism (philosophy of mathematics) Optics business.industry Ellipsometry Optical engineering business Reflectivity
Zdroj:	SPIE Proceedings.
ISSN:	0277-786X
Popis:	Comparison of the precision of measurements by means of null-ellipsometer with rotating analyzer is made here on the base of the developed formalism. The dependence of measurement's errors on the reflectivity of an investigated system is taken into account and is the base of the presented comparison.© (1997) COPYRIGHT SPIE--The International Society for Optical Engineering. Downloading of the abstract is permitted for personal use only.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::8c81693f915f15184ddb4e2babc01317 https://doi.org/10.1117/12.271825 Zobrazit plný text záznamu