Flexure-based XY micro-positioning stage with large stroke and coupling compensation
| Autor: | 张立龙 Zhang Li-long, 刘鹏博 Liu Peng-bo, 闫鹏 Yan Peng |
|---|---|
| Rok vydání: | 2016 |
| Předmět: |
Coupling
Computer science 010401 analytical chemistry 02 engineering and technology 021001 nanoscience & nanotechnology 01 natural sciences Atomic and Molecular Physics and Optics 0104 chemical sciences Electronic Optical and Magnetic Materials Compensation (engineering) Control theory Stroke (engine) Stage (hydrology) 0210 nano-technology |
| Zdroj: | Optics and Precision Engineering. 24:804-811 |
| ISSN: | 1004-924X |
| DOI: | 10.3788/ope.20162404.0804 |
| Databáze: | OpenAIRE |
| Externí odkaz: |
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