Exploring the resolution of different disk-type chemical sensors

Autor:	K.S. Demirci, Oliver Brand, S. Truax, Andreas Hierlemann
Rok vydání:	2009
Předmět:	chemistry.chemical_classification Detection limit Resonator chemistry.chemical_compound Materials science chemistry Resolution (electron density) Analytical chemistry Volatile organic compound Polymer Sensitivity (electronics) Toluene Layer (electronics)
Zdroj:	TRANSDUCERS 2009 - 2009 International Solid-State Sensors, Actuators and Microsystems Conference.
DOI:	10.1109/sensor.2009.5285703
Popis:	Chemical sensitivities and limits of detection to volatile organic compounds (VOCs) for polymer-coated disk resonators in the gas phase are reported. The dependence of the sensor performance on the device geometry is investigated. The use of rotational inplane modes results in high frequency stabilities, with Allan variances as low as 7.8×10−9 being achieved for 25µm thick resonators. A limit of detection of 18.3 ppm for toluene was obtained for a 5 µm thick device coated with an only 20 nm thick polymer layer.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::8c5f96f8f73cf51612f54a3b87e99fa5 https://doi.org/10.1109/sensor.2009.5285703 Zobrazit plný text záznamu