The structure of boron-, phosphorus- and nitrogen-doped tetrahedral amorphous carbon deposited by cathodic arc

Autor: Vicki J. Keast, C.A. Davis, David R. McKenzie, E. Kravtchinskaia, V.S. Veerasamy, Y. Yin, L. E. Hall, Gehan A. J. Amaratunga
Rok vydání: 1994
Předmět:
Zdroj: Journal of Non-Crystalline Solids. 170:46-50
ISSN: 0022-3093
DOI: 10.1016/0022-3093(94)90101-5
Popis: Some properties of amorphous carbon films prepared by filtered cathodic arc deposition were measured using electron diffraction and electron energy loss spectroscopy. Pure carbon films prepared in this way have more than 85% sp3 carbon. The effects on structure produced by doping the films with boron, phosphorus and nitrogen are determined. It was found that levels of these substances of up to 1% do not change the tetrahedral structure of the carbon network. At 15% nitrogen, the structure becomes a carbon nitrogen alloy consisting of a sp2-bonded network in which nitrogen substitutes for carbon. No evidence is found for a β-Si3N4-type structure for the carbon-nitrogen alloys.
Databáze: OpenAIRE