| Autor: |
Chia Lun Chang, Chun Fu Lin, Kow Ming Chang, Che Chun Liu, Hsiang Chen, Shan Wei Chang, Wei Kung Sung, Min Hau Kuo, Che Wei Chang, Chyuan Haur Kao, Ming Ling Lee |
| Rok vydání: |
2014 |
| Předmět: |
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| Zdroj: |
2014 12th IEEE International Conference on Solid-State and Integrated Circuit Technology (ICSICT). |
| DOI: |
10.1109/icsict.2014.7021639 |
| Popis: |
In the paper, the EIS structure with high-k CeO 2 sensing film has more responsive to H+ relative to Na+ and K+. The CeO 2 sensing membrane annealed with O 2 at 800°C shows a higher sensitivity of 58.76 mV/pH, higher linearity, lower hysteresis voltage of 5.97 mV and lower drift rate of 0.96 mV/hr than the other conditions. |
| Databáze: |
OpenAIRE |
| Externí odkaz: |
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